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The most recent version of the MEBW-60 family, the L135, is a unique tool combining precise electron beam power control down to the µm-range with high productivity and ultimate flexibility.
The MEBW-60 L135 is equipped with either a CNC driven bottom mounted x/y table or with a side mounted rotary manipulator. Conversion from a large single-drum into a six-drum rotary manipulator for high throughput and batch processing is very convenient. The optional egun-shift solution allows for maximum positioning flexibility. Workpiece observation is realized with the unique FOCUS SEM Mode “Scan & View” or by traditional optical means using a camera/lens system combination. A low maintenance pumping system with high pumping speed allows for very fast turnaround cycles.
Exhibitor: FOCUS GmbH